You can find all of the press releases from the Berliner Glas Group here.
The companies within the Berliner Glas Group are Berliner Glas, Berliner Glas Technical Glass and SwissOptic AG.
All publications of the individual companies are collected here. Moreover, we also provide you with various press images.
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Current press release
Berlin, Germany - 4 May 2020
Chucks and Clamps for the semiconductor equipment industry - A success story from the Berliner Glas Group
With customer-specific vacuum chucks, electrostatic chucks, precision structural components, reference mirrors and stage modules, Berliner Glas offers versatile products that are used in complex semiconductor production systems and meet the highest quality standards.
Chucks and clamps are key components of these production machines. Depending on the application, the chucks must meet different requirements. For example, they should have a defined clamping force or flatness and ensure that the wafer backside contamination is reduced.
Berliner Glas has extensive knowledge, expertise and many years of experience in chuck design and manufacturing of these high-quality products. Under the title "Perfecting Chucks", Berliner Glas has published several documents that describe the different approaches and tests that lead to meeting the challenging specifications of the semiconductor equipment industry.
Evaluation of a chuck's vacuum layout in the test center at the Berlin location
In addition, the company has set up a test center in Berlin to accelerate the development of customer-specific chucks. In this test center, test parts that are manufactured using the rapid prototyping process are checked and evaluated together with the customer very early in the development phase. Thus, it is possible to evaluate the basic principle of the chuck design inexpensively and above all quickly and to incorporate the experience made into the final design of the chuck. This minimizes risks, shortens development times and optimizes product properties.
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